• Summary
BM
Inspector means, equipment for the macro inspection and front / rear defect
inspection
for the silicon wafer of using such an automated
microscope, robot, macro loader and
X/Y
stage. In addition, the software may
review the defect through out the resulting file
in automatic test equipment,
and make it possible for the wafer deduction through creation
of SMF and/or AVI
file format.
• Functions
– Microscope
control
– Autoloader control
– X/Y
stage control
– Various
measurement functions at live image
– Defect
review function
– Wafer
deduction |
> Product > Software 
